Uncertainty analysis of sensitivity of MEMS microphone based on artificial neural network
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چکیده
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In this paper the effect of corrugated diaphragm on performance of MEMS microphone is described. The corrugated diaphragm is modeled in order to improve the sensitivity of micromachined silicon acoustic sensor. Analytical analyzes have been carried out to derive mathematic expressions for the mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that ...
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ژورنال
عنوان ژورنال: IEICE Electronics Express
سال: 2019
ISSN: 1349-2543
DOI: 10.1587/elex.16.20190623